Skip to main navigation menu Skip to main content Skip to site footer
ACI Avances en Ciencias e Ingenierías

Articles

Vol. 1 No. 1 (2009)

Macro-kinetic analysis of chemical vapor infiltration of Si layers and Si/SiC carbon biomorphic structures

DOI
https://doi.org/10.18272/aci.v1i1.9
Submitted
June 23, 2015
Published
2009-04-01

Abstract

En este artículo se presenta el modelo matemático desarrollado para describir y predecir el proceso de in­filtración y deposición de capas de Si y Si/SiC a partir de los sistemas de precursores: metiltriclorosilano (MTS)/hidrógeno y Tetracloruro de Silicio/hidrógeno. Este modelo se basa en la cinética obtenida en el análisis experimental de la deposición sobre substratos no porosos, en el modelo geométrico desarrollado para describir la estructura porosa de las preformas de carbono y en el cálculo de Módulo de Thiele y del factor de infiltración a partir del balance de masa. Finalmente se comprobaron los resultados del modelo matemática comparando la homogeneidad de la infiltración en preformas de carbono con un microscopio SEM.

viewed = 1596 times

References

  1. Almeida S., D. 2004. Kinetic Investigation of the Chemical Vapor Infiltration and Reaction (CVI-R) process for the Production of SiC and TiC Biomor- phic Ceramics from Paper Preforms; Dissertation, University of Erlangen - Nuremberg.
  2. de Jong, F.; Meyyappan, M. 1996. "Numerical si­mulation of silicon carbide chemical vapor deposi­tion"; Diamond and Related Materials; Vol. 5 (2); 1996; pp. 141 - 150.
  3. Pritzlaff, D.; Lautner, V. 1997. CVD - Beschichtungstechnik; 1. Auflage; Eugen G. Leuzer; Verlag; Saulgau; Germany.
  4. Ahmad, Z.; Mark, J.E. 1998. "Biomimetic mate­rials: recent developments in organic - inorganic hybrids"; Materials Science and Engineering C; Vol. 6; pp. 183 - 196.
  5. Zhou, B. 1993. "Biomemitc Design and Test of Composite Materials"; J. of Materials Science Technology; Vol. 9; pp. 9 - 19.
  6. Greil, P.; Vogli, E.; Fey, T.; Bezold A.; Popovska, N.; Gerhard, H.; Sieber, H. 2002. "Effect of Micro­structure on the fracture of biomorphous silicon carbide ceramics"; J. of the European Ceramic So­ciety; Vol. 22; pp. 2697 - 2707.
  7. Greil, P.; Lifka, T.; Kaindl, A. 1998. "Biomorphic Cellular Silicon Carbide Ceramics from Wood: II. Mechanical Properties"; J. of the European Ceram­ic Society; Vol. 18; pp. 1975 - 1983.
  8. Sieber, H.; Hoffmann, C.; Kaindl, A.; Greil, P. 2000. "Biomorphic Cellular Ceramics"; Advances Engineering Materials; Vol. 2 (3); pp. 105 - 109.
  9. Varela-Feria, F. M.; López-Robeldo, M. J.; Martí- nez-Fernández, J.; Arellano-López, A. R. 2002. "Precursor Selection for Property Optimization in Biomorphic SiC Ceramics"; Ceramic Engineering and Science Proc.; Vol. 23 (4); pp. 681 - 687.
  10. Varela-Feria, F. M.; De Arellano-Lobredo, A. R.; Martínez-Fernández, J. 2002. "Fabricación y Pro­piedades del Carburo de Silicio Biomórfico: Made­ras Cerámicas"; Boletín de la Sociedad Española de Cerámica y Vidrio; Vol. 41; pp. 377 - 384.
  11. Sieber, H.; Vogli, E.; Greil, P.. 2001. "Biomorphic SiC - Ceramic Manufactured by Gas Phase Infiltra­tion of Pine Wood"; Ceramic Engineering and Science Proceedings; 22 (4, 25th Annual Confe­rence on Composites, Advanced Ceramics, Mate­rials, and Structures: B, 2001); pp. 109 - 116.
  12. Vogli, E.; Sieber, H.; Greil, P. 2002. "Biomorphic SiC - ceramics prepared by Si - vapor phase infil­tration of wood"; J. of the European Ceramic So­ciety; Vol. 22; pp. 2663 - 2668
  13. Greil, P.; Vogli, E.; Fey, T.; Bezold A.; Popovska, N.; Gerhard, H.; Sieber, H. 2002. "Effect of Micro­structure on the fracture of biomorphous silicon carbide ceramics"; J. of the European Ceramic So­ciety; Vol. 22; pp. 2697 - 2707.
  14. Almeida Streitwieser, D., Popovska N., Gerhard, H., Emig, G. 2004. " Application of the Chemical Vapor Infiltration and Reaction (CVI-R) Technique for the Preparation of high Porous Biomorphic SiC Ceramics Derived from Paper" ; J. of the European Ceramic Society; Vol. 25(6); pp 817-828.
  15. Ohzawa, Y.; Hoshino, H.; Fujikama, M.; Nakane, K.; Sugiyama, K. 1998. "Preparation of high tem­perature filter by pressure - pulsed chemical vapor infiltration of SiC into carbonized paper - fibre pre­forms"; J. of Materials Science; Vol. 33; pp. 5259 - 5264.
  16. Popovska, N., Almeida Streitwieser, D., Gerhard, H., Emig, G. 2003. "Kinetic Analysis of the Low Temperature CVD of Silicon / Silicon Carbide from Methyltrichlorosilane / Hydrogen for the Ce- ramization of Biomorphic Carbon Preforms"; in Proceedings of the Int. Symp. Chemical Vapor De­position XVI and EUROCVD 14; Vol. 1; pp. 573 - 580.
  17. Popovska, N.; Almeida-Streitwieser, D.; Xu, C.; Gerhard, H.; Sieber, H. 2005. "Kinetic Analysis of the Processing of Porous Biomorphic Titanium Carbide Ceramics by Chemical Vapor Infiltration"; Chemical Vapor Deposition; Vol. 11 (3), pp 153 - 158.
  18. Almeida Streitwieser, D., Popovska, N.; Gerhard, H., Emig, G. 2004. "Processing of Biomorphous SiC Ceramics from Paper Preforms by Chemical Vapor Infiltration and Reaction(CVI-R) Tech­nique"; Ceramic Engineering and Science Proceed­ings; 25 (4, 28th; Chapter 7: References 228; Inter­national Cocoa Beach Conference on Advanced Ceramics and Composites, 2004,Symposium 3)
  19. Choy, K.L. 2003. "Chemical vapour deposition of coatings; Progress in Materials Science; Vol. 48; pp. 57 - 170.
  20. Pierson, H. O. 1999. Handbook of Chemical Vapor Deposition (CVD): Principles, Technology and Ap­plications; 2nd edition; Noyes Publications; Wil­liam Andrew Publishing, LLC, USA.
  21. Sheldon, B.W.; Besmann, T.M. 1991. "Reaction and Diffusion Kinetics During the initial Stages of Isothermal Chemical Vapor Infiltration"; Journal of American Ceramic Society; Vol. 74 (12); pp. 3046 - 3053.
  22. Jakubith, M. 1992. Chemie und Chemietechnik, Memofix; VCH Verlagsgesellschaft; Weinheim - Germany.